The utility of the resonant x-ray reflectivity (RXR) method as a non-destructive structural probe for study of nanometric scale structures is demonstrated.

For a Ni/Fe alloy thin film, the RXR method is used for determining the composition profile which is impossible with the regular x-ray reflectivity technique. The RXR method is also used to study the interface structures of two Cr/Fe superlattices deposited on MgO substrates with different crystal orientations. The by now most unique and accurate results in quantitative determination of the embedded interfacial roughness for this system is obtained .

Also included in this dissertation is an extensive discussion of the theories and experimentation of x-ray reflectivity with synchrotron radiation. Different interface models and calculation methods are compared and, Particularly, two calculation formalisms, the form factor method and the line-segment approach are developed and used in the analysis of the resonant reflectivity data.